2

Contact resistivity of shallow junctions formed by implantation through Pt or PtSi

Year:
1992
Language:
english
File:
PDF, 566 KB
english, 1992
3

Series resistance of self-aligned silicided source/drain structure

Year:
1993
Language:
english
File:
PDF, 1.03 MB
english, 1993
6

Dielectric degradation of Pt/SiO2/Si structures during thermal annealing

Year:
1993
Language:
english
File:
PDF, 2.17 MB
english, 1993
16

Formation of 0.1-μm n+p junction by As+ implantation through Pt or PtSi film

Year:
1990
Language:
english
File:
PDF, 540 KB
english, 1990
19

Formation and characterization of a PtSi contacted n+p shallow junction

Year:
1990
Language:
english
File:
PDF, 1.25 MB
english, 1990
20

Low-temperature reaction of thin-film platinum (≤300 Å) with (100) silicon

Year:
1990
Language:
english
File:
PDF, 846 KB
english, 1990